• 专利附录
  • 专利说明
  • 权利要求
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  • 法律状态
  • 优先权
    • 专利摘要:
    A dry electrode for biometric measurement, comprising a substrate (10) forming the scaffold of the electrode, the substrate comprising metal or semiconductor material; an electrically conductive film (20) on a first surface of the substrate (10); and an attaching element (30) for attaching the electrode; wherein the electrically conductive film (20) is directly deposited on the first surface of the substrate (10).
    公开号:FI20205059A1
    申请号:FI20205059
    申请日:2020-01-21
    公开日:2021-04-15
    发明作者:Teemu Ruotsalainen；Tomi Mattila；Henrik Sandberg；Wonjae Kim；Sanna Arpiainen；Colm Mccaffrey
    申请人:Teknologian Tutkimuskeskus Vtt Oy；
    IPC主号:
    专利说明:

    [0001] [0001] The present application generally relates to biometric measurement. In particular, but not exclusively, the present application relates to electrodes used in biometric measurement. In particular, but not exclusively, the present application relates to dry electrodes for measuring biopotential signals such as ECG,EEG, EMG and EOG signals in addition to bioimpedance measurements.BACKGROUND
    [0002] [0002] This section illustrates useful background information without admission of any technique described herein being representative of the state of the — art.
    [0003] [0003] Biometric measurements, such as ECG and EEG are widely used in medicine and health monitoring. Electrodes used in these measurements need be cost effective, easy to use and compatible with human skin, i.e. not irritating.
    [0004] [0004] Currently, pre-gelled Ag/AgCl electrodes dominate the market in electrodes used in clinical biopotential recorders as they are a close approximation of nonpolarizable electrodes and their half-cell potential is compatible with body composition. However, such pre-gelled Ag/AgCl electrodes present some challenges, such as rigidity causing discomfort during long-term use, skin irritation and rash, a delay of several minutes before electrodes start to operate and gain proper biometric o 25 signals, performance degradation over time as the gel dries or reacts with sweat. N Moreover, silver is rather an expensive and toxic material.
    [0007] [0007] Various aspects of examples of the invention are set out in the claims.
    [0008] [0008] According to a first example aspect of the present invention, there is provided a dry electrode for biometric measurement, comprising a substrate forming the scaffold of the electrode, the substrate comprising metal or semiconductor material; an electrically conductive film on a first surface of the substrate; and an attaching element for attaching the electrode; wherein the graphene film is directly deposited on the first surface of the substrate.
    [0009] [0009] The electrically conductive film may comprise a graphene film.
    [0010] [0010] The graphene film may comprise a nanolayer of graphene, comprising a monolayer of graphene, or multiple layers of graphene.
    [0011] [0011] The electrically conductive film may cover substantially the entire first — surface of the substrate.
    [0012] [0012] The attaching element may comprise an adhesive element for attaching the electrode to skin.
    [0013] [0013] The attaching element may comprise an element for attaching the electrode to a further entity, such as clothing or a further item being in contact with skin.
    [0014] [0014] The dry electrode may be flexible.
    [0015] [0015] The metal or semiconductor material may comprise copper, nickel, iron, aluminum, zinc, titan, platinum, germanium, gallium, arsenic, indium, cobalt, palladium, tungsten, chromium, golds, silver, iridium, ruthenium, rhenium, rhodium, tin, o 25 steel, alloys of the foregoing, Si, SiO2, SiC, AI203, SI3N4 , SrTiO3, or hexagonal N boron nitride.
    [0019] [0019] The electrically conductive film may comprise a graphene film.
    [0020] [0020] Different non-binding example aspects and embodiments of the present invention have been illustrated in the foregoing. The embodiments in the foregoing are used merely to explain selected aspects or steps that may be utilized in implementations of the present invention. Some embodiments may be presented only with reference to certain example aspects of the invention. It should be appreciated that corresponding embodiments may apply to other example aspects as well.BRIEF DESCRIPTION OF THE DRAWINGS
    [0021] [0021] For a more complete understanding of example embodiments of the present invention, reference is now made to the following descriptions taken in — connection with the accompanying drawings in which:
    [0022] [0022] Fig. 1 shows a schematic side view of a dry electrode for biometric measurement according to an embodiment of the invention;
    [0023] [0023] Fig. 2 shows a schematic front view of a dry electrode for biometric measurement according to an embodiment of the invention; and
    [0024] [0024] Fig. 3 shows a flow diagram of a manufacturing method of a dry electrode for biometric measurement according to an embodiment of the invention.
    [0027] [0027] The dry electrode 100 further comprises an electrically conductive film 20 on a first surface of the substrate 10. In an embodiment, the electrically conductive film 20 comprises a graphene film. It is to be noted that although a graphene film 20 is referred to hereinafter, in further embodiments, the electrically conductive film comprises material selected from the group of ZnO, Ru, Pt, TiN, TiC, ZrC, VC, HfC, Cr7Ca, Cr2Ca, Co2C, MgTe, AISb, Si3N4, SiC, TiS2, CuxSe GaN, GaAs, GaSb Rh203, CdSe, InP, In2Sea, InAs, InSb, Lu203, WiC and WNxCy or a combination thereof.
    [0028] [0028] The graphene film 20 is directly deposited, or grown, on the first surface of the substrate using a suitable deposition method. The skilled person appreciates that the substrate 10 in an embodiment, is removed, for example by cutting, from a larger substrate on which a graphene film has been deposited, i.e. direct deposition does not require that the substrate 10 was in its final shape and/or — size during deposition. In a further embodiment, the substrate 10 comprises a three- dimensional structures, such as indentations and/or protrusions. In a further embodiment, the substrate is 10 in the form of spring-like elements , has a structure akin to fibrous material such as wool, or a porous structure akin to a mesh or a honeycomb
    [0029] [0029] The technical effect of direct deposition of the graphene film is a substantial simplification of the process of manufacturing the dry electrode, an improved adhesion of the graphene film to the substrate and a uniform covering of the substrate surface with the graphene film as opposed to prior art systems in which the graphene film is first deposited on a separate substrate and then transferred with o 25 complicated multi step processes on an electrode. N [0030] In an embodiment, the graphene film 20 comprises a nanolayer of O graphene, for example a monolayer of graphene grown on the surface of the substrate N 10. In a further embodiment, the nanolayer of graphene comprises a multilayer growth. E [0031] In an embodiment, the graphene film 20 is directly deposited using a D 30 chemical vapor deposition, CVD, method or atomic layer deposition, ALD, method or 3 sputtering. Further suitable deposition methods may be used in an embodiment, as O long as uniformity of the film and adhesion to the substrate are comparable with the deposition methods mentioned hereinbefore.
    [0032] [0032] The graphene film 20 provides for, as also previously known, for a low 4 impedance between the electrode and the skin. With the graphene film being deposited directly on the substrate, with good adhesion and film uniformity, the dry electrode provides for excellent signal quality and protection against corrosion, as the graphene film protects the substrate as well. Furthermore, the graphene film provides for non-toxicity and minimizes any chemical reaction between the skin and the electrode.
    [0033] [0033] In an embodiment, the substrate 10 and the graphene film 20 and consequently the dry electrode 100 are flexible providing the technical effect that the dry electrode is easily attached to skin in various positions as well as to a further entity — such as to clothing without compromising ease of use and comfort of the user.
    [0034] [0034] The dry electrode 100, in an embodiment, further comprises an attaching element 30. In an embodiment, the attaching element 30 comprises an adhesive element configured for attaching the dry electrode 100 to the skin of the subject of the measurement. As the dry electrode 100 is light and thin due to the — directly deposited graphene nanolayer, the adhesive element need not provide strong adhesion and accordingly more skin friendly and less irritating adhesives can be used. In an embodiment, the adhesive element surrounds the substrate 10 and/or the graphene film 20. In a further element, the adhesive element resides on the graphene film 20, partially overlapping it while leaving a contact surface to the skin available, as shown in Fig. 2.
    [0035] [0035] In a further embodiment, the attaching element 30 comprises an element for attaching the electrode 100 to a further entity, such as clothing. Such an element in and embodiment comprises for example elements such as Velcro, buttons or magnetic elements.
    [0038] [0038] Fig. 3 shows a flow chart of a method for manufacturing a dry electrode according to an embodiment of the invention. At 310 a substrate 10 configured to function as the scaffold of the electrode is provided, for example a copper substrate.
    [0039] [0039] The inventors have found that a dry electrode according to the embodiments of the invention is easily and cost effectively manufactured as described herein. In previous methods in which graphene is first grown on a metal substrate and then transferred to an electrode with wet etching process requiring several steps, such an ease of manufacturing with low cost and an end product with uniformity and strong adhesion to the electrode cannot be achieved.
    [0040] [0040] Some use cases relating to given embodiments of the dry electrode according to embodiments of the invention, are presented in the following. In a first use case, the dry electrode 100 is used directly on human skin and is comfortable and non-irritating to wear due to lightness and less irritating adhesive strength.
    [0041] [0041] In a second use case, the dry electrode 100 is used in a wearable o 25 measurement system, wherein the dry electrode is easily attached and N accommodated due to thinness and flexibility. O [0042] In a third use case, mesh type electrode elements 10 and 20 are N attached on the bottom side of a kinesio tape, or similar type of adhesive wherein the E system facilitates the body's natural healing process, providing support and stability 2 30 to muscles and joints while allowing measurement of biopotential signals. 3 [0043] In a fourth use case, the dry electrode 100 is used in a sport
    [0044] [0044] In afifth use case, the dry electrode 100 is used in a body 6 composition-measuring unit.
    [0045] [0045] Without in any way limiting the scope, interpretation, or application of the claims appearing below, a technical effect of one or more of the example embodiments disclosed herein, in addition to the technical effects explained hereinbefore, is the provision of a simple and cost effective dry electrode. Another technical effect of one or more of the example embodiments disclosed herein is the provision of a dry electrode suitable for cheap mass production. Another technical effect of one or more of the example embodiments disclosed herein is improved signal quality due to low impedance level. Another technical effect of one or more of the example embodiments disclosed herein is the provision of an electrode that is comfortable to wear due to flexibility and breathability, as no strong adhesive or moisture barrier to prevent drying is needed. Another technical effect of one or more of the example embodiments disclosed herein is that the shape and the structure of the electrode as the conductive element can be cut and structured before or after graphene deposition to various forms such as spring, wool, mesh, honeycomb or porous to facilitate good skin contact, flexibility, and breathability. A still further technical effect of one or more of the example embodiments disclosed herein is the provision of a disposable electrode, as no chemicals are needed.
    [0046] [0046] Although various aspects of the invention are set out in the independent claims, other aspects of the invention comprise other combinations of features from the described embodiments and/or the dependent claims with the features of the independent claims, and not solely the combinations explicitly set out in the claims.
    [0047] [0047] It is also noted herein that while the foregoing describes example o 25 embodiments of the invention, these descriptions should not be viewed in a limiting N sense. Rather, there are several variations and modifications which may be made O without departing from the scope of the present invention as defined in the appended N claims.
    I Ao aOLOOLOOQAO
    N 7
    权利要求:
    Claims (14)
    [1] 1. A dry electrode for biometric measurement, comprising a substrate (10) forming the scaffold of the electrode, the substrate comprising metal or semiconductor material; an electrically conductive film (20) on a first surface of the substrate (10); and an attaching element (30) for attaching the electrode; characterized in that the electrically conductive film (20) is directly deposited on the first surface of the substrate (10).
    [2] 2. A dry electrode of claim 1, wherein the electrically conductive film (20) comprises a graphene film.
    [3] 3. A dry electrode of claim 2, wherein the graphene film comprises a nanolayer of graphene, comprising a monolayer of graphene, or multiple layers of graphene.
    [4] 4. A dry electrode of claim 1 or 2, wherein the electrically conductive film (20) comprises material selected from the group of ZnO, Ru, Pt, TiN, TiC, ZrC, VC, HfC, Cr7Ca, CraC3, Co2C, MgTe, AISb, Si3N4, SiC, TiS2, CuxSe GaN, GaAs, GaSb Rh203, CdSe, InP, In2Sea, InAs, InSb, Lu203, VC and WNxCy or a combination thereof. o 25
    [5] 5 A dry electrode of any preceding claim, wherein the electrically conductive film O covers substantially the entire first surface of the substrate (10).
    [6] 6. A dry electrode of any preceding claim, wherein the attaching element (30) - comprises an adhesive element for attaching the electrode to skin. E 30 2
    [7] 7. A dry electrode of any preceding claim, wherein the attaching element comprises 3 an element for attaching the electrode to a further entity, such as clothing or a O further item being in contact with skin.
    [8] 8 A dry electrode of any preceding claim, wherein the dry electrode is flexible. 8
    [9] 9. A dry electrode of any preceding claim, wherein the metal or semiconductor material comprises copper, nickel, iron, aluminum, zinc, titan, platinum, germanium, gallium, arsenic, indium, cobalt, palladium, tungsten, chromium, golds, silver, iridium, ruthenium, rhenium, rhodium, tin, steel, alloys of the foregoing, Si, SIO2, SiC, Al203, Si3N4 , SrTiO3, or hexagonal boron nitride.
    [10] 10. A dry electrode of any preceding claim, wherein the electrically conductive film (20) is deposited directly on the first surface of the substrate using chemical vapour deposition, CVD, or atomic layer deposition, ALD.
    [11] 11. A dry electrode of any preceding claim, further comprising a connector element on a second surface of the substrate.
    [12] 12.A method of manufacturing the dry electrode of any of the claims 1 to 11 comprising depositing an electrically conductive film (20) directly on a first surface of a metal substrate using chemical vapour deposition, CVD, or atomic layer deposition, ALD.
    [13] 13.The method of claim 12, wherein the electrically conductive film (20) comprises a graphene film.
    [14] 14. The method of claim 12 or 13, wherein the electrically conductive film comprises material selected from the group of ZnO, Ru, Pt, TiN, TiC, ZrC, VC, HfC, Cr7Cs, Cr2Ca, Co2C, MgTe, AISb, SiaN4, SiC, TiS2, CuxSe GaN, GaAs, GaSb Rh20s, o CdSe, InP, In2Sea, InAs, InSb, Lu203, WiC and WNxCy or a combination thereof.
    S
    N > N 30
    I = o
    LO
    O
    LO
    O
    N
    O
    N 9
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